中文摘要：

设计并制作了基于绝缘体上硅（SOI）材料的16通道光功率可调波分复用/解复用器（VMUX/DEMUX）,其信道间隔为200 GHz。该VMUX/DEMUX器件为阵列波导光栅和电吸收型可调光衰减器的单片集成。给出了器件的基本工作原理、基本结构以及器件的结构参数值,并对器件进行了测试,且对测试结果进行了简单分析。测试结果显示,该VMUX/DEMUX器件的片上损耗为9.324～10.048 d B,串扰为6.5～8.2 d B;在20 d B衰减下,单通道最大功耗为87.98 m W;16通道中最快响应上升时间为34.5 ns,下降时间为37.0 ns,响应时间为71.5 ns,所有通道的响应时间均在100 ns以下。该器件整体尺寸为2.9 mm×1 mm,能够实现良好的波分复用/解复用及信道功率均衡的功能。

英文摘要：

A 16 channels variable attenuator multiplexer / demultiplexer（ VMUX / DEMUX） based on silicon on insulator（ SOI） was designed and fabricated,and its channel spacing is 200 GHz. The demonstrated VMUX / DEMUX is the monolithic integration of arrayed waveguide grating and electrical-absorption variable optical attenuator. The fundamental working principle,basic structure and structural parameter values of the device were introduced. Then some performances of the VMUX / DEMUX were gained by doing some corresponding measurements,and the test results were analyzed. The test results show that the on-chip loss of the VMUX / DEMUX device is 9. 324-10. 048 d B and the crosstalk is 6. 5-8. 2 d B. For the 16 output channels,the maximum power consumption is 87. 98 m W at 20 d B attenuation. The response time is 71. 5 ns with 34. 5 ns rise-time and 37 ns fall-time,and the response time of all channels is below 100 ns. The overall size of the device is 2. 9 mm×1 mm,and the VMUX / DEMUX performs an excellent function of wavelength demultiplexing and optical power balancing in 16 channels.