中文摘要：

采用非平衡磁控溅射法在316L不锈钢制成的血管支架表面制备Ti以及TiO2薄膜，初步研究了Ti薄膜厚度、TiO2薄膜沉积速率对薄膜在血管支架表面附着状况的影响。结果表明，支架表面较薄的Ti薄膜附着状况较厚的Ti薄膜好；低沉积速率制备的TiO2薄膜在支架表面附着状况好于高沉积速率制备的TiO2薄膜；对于Ti／TiO2复合薄膜，Ti层厚度过大不利于Ti／TiO2复合薄膜在支架表面附着。

英文摘要：

In this paper the adhesion of Ti and TiO2 films deposited on 316L stainless steel stent by unbalanced magnetron sputtering were studied. The Adhesion of the thinner Ti film was better than that of the thicker films. The results indicate that the adhesion of the TiO2 film fabricated at lower deposition rate was better than that deposited at higher deposition rate. The Ti/TiO2 duplex films also were synthesized on 316L stainless steel stent. The Adhesion of the films decreased as the Ti buffer layer thickness increase.