中文摘要：

采用水／氧气，丙烯酸／氧气脉冲射频等离子体处理方法，对氧化钛薄膜进行表面改性。结果表明，水蒸气／氧气混合气体等离子体处理在氧化钛薄膜表面产生了吸附水及游离羟基，丙烯酸／氧气混合气体等离子体处理在氧化钛薄膜表面形成了羟基、羧基和羰基官能团。经水蒸气／氧气、丙烯酸／等离子体处理的氧化钛薄膜的水接触角分别降低了67．3和58．5°，极性分量分别增加了36．5和50．9mJ／m^2，表现出很好的亲水性。

英文摘要：

Water/oxygen and acrylic acid/oxygen plasma generated by pulsed radio frequency power were used to treat the surfaces of titanium oxide films. The treatment of water/oxygen plasma produced some adsorptive water and hydroxyl groups on titanium oxide films. Acrylic acid/oxygen plasma treatment induced hydroxyl, carboxyl, alkyl functional groups on titanium oxide films effectively. Compared with the untreated titanium oxide films, the water contact angle of titanium oxide films treated by water/oxygen and acrylic acid/oxygen decreased 67.3 and 58.5°respectively. The polar component of titanium oxide films treated by water/oxygen and acrylic acid/oxygen increased 36.5 and 50.9mJ/m^2 respectively. The hydrophilic property was enhanced significantly by the water/oxygen and acrylic acid/oxygen plasma treatment, on titanium oxide films.