中文摘要：

提出利用具有双兰杰文振子的H定子驱动的压电平面电机,选定H定子两纵杆沿x Oy面的一纵、二弯模态,及沿z Oy面的二弯模态为工作模态,将两纵杆设计成夹心变截面结构并以其上端为驱动足。一纵模态分别与两相二弯模态进行振动耦合,使两驱动足沿x Oy、z Oy面作椭圆运动而交替地推动动子作平面运动。阐释了电机工作原理及其驱动足做椭圆运动条件。基于工作模态频率一致性目标建立定子优化模型,解得定子优化尺寸。建立定子机电耦合有限元模型,求取电机的谐响应及模态干扰特性。设计出电机装配模型,获取其调频、调压、调相工作特性。仿真了定子运行状态,模拟出驱动足两相椭圆轨迹且当驱动电压为250 V时,驱动足x、y、z向振幅为1.5μm、2.5μm和4.7μm。该电机有望输出较大推力与速度。

英文摘要：

A piezoelectric planar motor based on 1^st order anti-symmetric longitudinal mode and 2nd order bending mode in xOy plane, and 2nd bending mode in zOy plane of the two Langevin-typed vibrators of an H-shaped stator, was proposed. It employed the upper ends of vibrators as driving feet, and used piezoelec- tric ceramics （PZT） in the stator to excite working modes vibration to make driving feet move in ellipse trajectories along xOy and zOy planes. Working mechanism of the motor was detailed, and generating con- ditions for elliptical trajectories was derived. A structural dynamic optimization model to make all the modes frequency be consistent was established, so that optimized dimensions for the motor could be ob- tained. A dynamic finite element model for stator was built with its feet displacement frequency response characteristics and jamming modes characteristics being analyzed. An assembling model for the motor was given, and speed regulation characteristics of the mode were illustrated. Working states of the stator were simulated, exhibiting that the driving feet moving along two elliptical trajectories well and their vibration amplitudes in x,y and z directions were 1.5 μm,2.5 μm,4.7 μm respectively when 250 V driving voltage were applied to the PZT. It shows that the motor can generate large thrust and speed, and is of wide application prospects.