提出一种基于夹心变截H式定子的直线电机,选定定子一阶反对称纵振和二阶对称弯振为工作模态。阐释了电机驱动机理,推导了定子驱动端椭圆运动解析方程;建立了定子参数化有限元模型,进行了定子模态频率灵敏度分析,实现了纵、弯模态匹配及频率一致性;设计出定子基本尺寸为37 mm×60 mm,规划出定子压电陶瓷极化供电方案,厘定电机驱动频率点为49 k Hz。通过施加电压载荷对定子振动特性进行了数值仿真,求得定子在200 V电机激励下的纵、弯工作振幅为8μm和6μm,模拟出驱动端椭圆轨迹,验证了电机原理可行性,为样机的研制提供了理论依据。
A Langevin type H-shaped linear ultrasonic stator powered by its 1 st anti-symmetric longitudinal mode and 2nd symmetrical bending modes was proposed. The motor' s driving principle was detailed, and elliptical trajectory generated by particles on stator drive ends was derived. A FEM model was built to investigate the stator dynamic characteristics, so that the modal frequency sensitivities to some key geometric dimensions of stator were figure out, which results in longitudinal and bending working modal frequency being consistent. The stator' s primary dimension was designed to he 37 mm × 60 mm, and the motor' s operating frequency is 49 kHz. Simulations were executed to work out the longitudinal and bending working modal vibration amplitudes to 8 μm and 6 μm on condition of 200 voltages, and to demonstrate the elliptical trajectories on driving ends, which validate the feasibility of the motor. This motor is expected to be used in precision positioning fields.