中文摘要：

高硅钢（6．5％（质量分数）Si）是一种具有高磁导率、低矫顽力和低铁损等优异软磁性能的合金。但高硅钢的室温脆性和低的热加工性能严重影响了其在工业领域的应用。综述了化学气相沉积、等离子体化学气相沉积、电泳沉积、熔盐电沉积、电子束物理气相沉积及激光熔覆等6种沉积扩散法制备高硅钢的工艺和参数，从工艺路线、反应机理分析和性能的改善等几方面，概述了各种方法的研究现状和主要的优缺点，并简要论述了其发展前景，指出了今后的主要研究方向。

英文摘要：

Fe-6.5wt%Si steel is one kind of soft magnetic materials with high permeability, low coercivity and iron loss. However, its room temperature brittleness and poor workability limit its industrial application. The preparation technology and parameters of high silicon steel by deposition-diffusion are reviewed. This paper mainly introduces chemical vapor deposition,plasma chemical vapour deposition, electrical phoretic deposition,molten salt electro-deposition, electron beam physical vapor deposition and laser cladding. The research status and the advantages and disadvantages of these methods are summarized from the aspects of process route, reaction mechanism and improvement of performance. The prospect of the method is briefly discussed. The main directions for further studies in this field are suggested.