中文摘要：

提出了一种基于静电驱动的新型谐波微马达,并描述了该微电机的基本工作原理,分析了进行转子面外动力学研究的必要性。基于传动系统的变形能、动能和电场能,利用Hamilton原理得出了转子面外自由振动平衡方程。然后,对两种不同的模态进行了求解,给出了系统自由振动频率的表达式,分析了系统参数对自由振动频率的影响规律。研究结果对于该马达的动力学性能设计以及工作参数的选择具有重要的指导意义。

英文摘要：

A novel electrostatic harmonic micro-motor is proposed and its operating principle is described.The necessity to investigate out-plate dynamics for the drive system is analyzed.Based on deformation energy,kinetic energy and electric field energy,the dynamic differential equation is obtained by means of Hamilton principle.The equation is solved for two different modes and the equation of the natural frequency is derived.The changes of the natural frequency along with the system parameters are given.The results are useful for the dynamic characteristic design of the micro-motor and the reasonable system parameters determination.