中文摘要：

利用丝网印刷工艺在印有金电极的陶瓷基片上负载WO3多孔厚膜,再在500℃、600℃、700℃、800℃下烧结制成气敏器件,测试了其在甲苯中的伏安曲线和气敏响应特性.由SEM统计分析了4种厚膜的烧结颈信息,并通过导电模型结合Ⅰ-Ⅴ曲线拟合得到耗尽层宽度.依据烧结颈宽度和2倍耗尽层宽度的差值将烧结颈分成3类：宽颈、窄颈和闭颈,比较了三者对灵敏度的贡献.实验结果表明,不同类型的烧结颈含量直接影响材料的灵敏度,烧结颈含量越高的材料,其灵敏度越高.其中,有开关效应的窄颈对材料灵敏度贡献最大.

英文摘要：

The sensors were obtained by applying different sintering temperatures, 500 ℃, 600 ℃, 700 ℃, 800 ℃ on WOa porous films printed by screen printing onto the Au parallel electrode which was preprinted on the alu- mina substrate. Their sensing properties to toluene atmosphere and I-V characteristics were tested, respectively. The neck width and neck density were counted through SEM photographs of the films. The width of depletion layer was calculated by fitting the conduction model in the measured I-V data. Necks were classified into three types, broad neck, narrow neck and closed neck, according to the difference in width between depletion layer and neck. Their con- tributions to sensitivity were analyzed, respeqtively. The results indicate that the sensitivity was directly influenced by the contents of different necks. The material within more necks occupied higher sensitivity. Among them, the narrow neck acting as switching role contributed to the sensitivity considerably.