中文摘要：

为了提高超声电机驱动的纳米级微操作手的控制精度,研究了它的结构和材料参数的优化设计。首先,构造了影响指针尖端振动的参数化模型,对影响指针尖端振动幅度的各项参数进行了灵敏度分析,根据灵敏度分析结果建立了抑制微操作手指针尖端振动的多维约束优化模型。在求解过程中发现了内点罚函数法障碍项失效的现象,对内点罚函数法进行了改进,利用改进后的内点罚函数法和牛顿法迭代求解,求解结果表明改进后的内点罚函数法对于设计变量的约束更有效。其次,用有限元软件Ansys workbench对求解结果的可行性进行了验证。最后振动测试实验表明,优化前指针的振动幅度为16.33μm,优化后指针的振动幅度为2.51μm。优化后指针尖端的振动幅度缩小了84.6%,对指针尖端的振动产生了明显的抑制效果,说明了优化方案的有效性。

英文摘要：

In order to improve the control precision of the micromanipulator driven by linear ultrasonic motors,an optimal design about the structure and material parameters was studied.First,establish a parameterized model which affects the vibration of the end-effector,then analyze the sensitivity of various parameters affecting the vibration amplitude.According to the results of sensitivity analysis,the multidimensional constraint optimization model was established to suppress the vibration of the micromanipulator end-effector.Due to the failure of the Penalty term in Interior Penalty Function Method during the solving process,the Interior Penalty Function Method as well as Newton＇s iterative solving method were all improved,whose result indicates that the improved Interior Penalty Function Method is more effective for restraining the design variables.Second,the feasibility of the solving results was verified by using the finite element software Ansys workbench.Finally,the vibration tests show that the vibration amplitude of the end-effector is 2.51μm after optimization,while the vibration amplitude of the end-effector is 16.33μm before optimization.The vibration amplitude of the micromanipulator end-effector shrank by 84.6% after optimization.The obvious inhibitory effect in the vibration of the end-effector illustrates the effectiveness of the optimization method.