中文摘要：

玻璃基毛细管加热系统拉制的微纳通道的尖端会有堵塞现象,为了改进微纳通道的制造技术与研究其阻值规律,建立了一套磨针仪与电测系统。首先,用玻璃基毛细管加热系统制备外径1.5~10μm的玻璃基毛细管,通过基于超声电机与振动学原理制造出的磨针仪磨制毛细管的尖端,然后用电测法判断磨制后毛细管尖端是否为通道。对于通道,用插值法拟合函数对内径小于10μm的玻璃基通道的尖端内电阻阻值进行计算,研究电阻和通道尖端内径的相关规律。实验结果表明,该磨针仪成功地磨制出孔内径小于2μm的玻璃基微纳通道,通道内的阻值和通道尖端内径成反比关系。

英文摘要：

The blocking phenomenon appears in the tip of the micro - nanochannel fabricated with the glass capillary heating system. A set of grinding needle gauge and electricity measurement system was established for improving the micro - nanochannel manufacturing technology and studying the rules of the resistance of the channel. Firstly, the glass capillary with the outer diameters between 1.5-10 μm was produced by the glass capillary heating; And then, the tip of the capillary was grinded by the grinding needle gauge which was manufactured based on the ultrasonic motor and the vibration principles. Secondly, the electricity measurement method was used to identify whether the tip after grinding was the channel. The internal resistance value of the tip of the glass channel whose inner diameter under 10 microns was calculated by the fitting function with the interpolation method, and the relevant laws between the resistance and the inner diameter were studied. The experimental results show that the glass micronanochannel with inner diameter less than 2μm can be successfully produced by the grinding needle gauge, and the resistance in the channel is inversely proportional to the inner diameter of the channel.