中文摘要：

对化学气相沉积（CVD）中输运现象的研究进行了总结。重点阐述了典型的水平式和垂直式CVD反应器中混合对流的模拟结果，以及反应器几何形状、壁面温度、流体流速、压强、浓度梯度等因素对其的影响。

英文摘要：

The researches of transport phenomena in CVD are summarized. The mixed recirculation is mainly showed via simulation in the typical CVD reactors of horizontal and vertical. The recirculation, which is influenced by the shape of reactor, temperature ofwaU, velocity of the flow, pressure and gradient of concentration, is discussed in detail.