由于真空沿面放电产生气体对于沿面放电发展过程产生重要影响,介绍了真空沿面放电产生气体来源于电介质表面气体脱附的研究现状,分析了真空沿面放电产生气体的多重来源,对真空沿面放电产生气体的各种分析方法进行了归纳讨论,提出了国内开展此项研究需要注意的问题和建议。
The gas-generating of surface discharge in vacuum plays an important role in the development of surface discharge.The research status of the gas-generating of surface discharge in vacuum originated from gas desorption of dielectric surface was presented.Different sources of the generated gases were analyzed,and various analysis methods were summarized and discussed.Some problems in the research of the title were pointed out and corresponding suggestions were proposed.