中文摘要：

真空沿面放电机理研究中一般认为电介质表面产生气体对沿面放电发展产生重要影响。采用长度为200ns的高压振荡脉冲对氧化铝陶瓷和聚四氟乙烯两种材料试品进行真空沿面放电实验,通过质谱分析法对真空沿面放电产生气体进行分析。实验分析获知真空沿面放电产生气体主要成分为H2、O2、N2、CO、CO2、H2O以及CxHy烃分子碎片,同时获知聚四氟乙烯在沿面放电中发生分解产生CxFy碎片。获得了放电产生气体数量与放电能量的实验关系。对真空沿面放电产生气体的来源和机制进行了分析讨论,真空沿面放电中气体产生机制并非国际上通常认为的电介质表面气体脱附单一机制,而是具有包括脱附、溶解气体逸出和材料分解在内的复合机制。

英文摘要：

In research domain of surface discharge in vacuum,it is generally accepted that gases generated by dielectric surface have an important influence on surface discharge.Gases generated by surface discharge in vacuum can be analyzed by mass spectrometry.Main components of gases generated by surface discharge at 200 nanosecond oscillatory pulse voltage in vacuum are H2,O2,N2,CO,CO2,H2O,and CxHy hydrocarbon fragment.Polytetrafluorethylene is decomposed in surface discharge and produces CxFy fragment.The experimental relation of gases generated by surface discharge and discharge energy is obtained.Analysis of the sources and the mechanism of gases generated by surface discharge in vacuum reveals that the mechanism of gases generation is not generally accepted as single mechanism of desorption,instead,the mechanism is multiple mechanism which includes desorption,release of dissolved gases and decomposition of dielectric.