提出了一种采用合金材料封装的耐高压光纤布拉格光栅(FBG)压力传感结构,从理论分析了FBG压力传感器的传感机理,实现了压强的0~20 MPa检测。对实验数据进行曲线拟合处理,线性拟合度达到了0.9996,压强响应灵敏度为12.1 pm/MPa,迟滞误差仅有0.185%,重复性误差也仅为0.020%。可实现温度补偿,并达到压力温度的同时区分测量。
A fiber Bragg grating(FBG) pressure sensor is proposed based on alloy material packaging technology,and its sensing mechanism is analyzed.The pressure range of 0~20 MPa is tested.The experiment indicates that its linearity is 0.999 6 and pressure sensitivity is about 12.1 pm/Mpa,Hysteresis error is only 0.185 %,and the repeated error is only 0.020 %.This sensor can achieve temperature compensation and simultaneous discriminating measurement of temperature and pressure.