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long range surface Plasmon interference lithography
  • ISSN号：0167-9317
  • 期刊名称：Microelectronic Engineering
  • 时间：0
  • 页码：2184-2187
  • 相关项目：基于近场超级透镜的亚波长纳米光刻技术的研究
作者： Xiaowei Guo|Qiming Dong|
同期刊论文项目
基于近场超级透镜的亚波长纳米光刻技术的研究
期刊论文 9 会议论文 3
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