中文摘要：

采用金属有机化学气相沉积方法,在不同氧气分压下,对硅衬底氧化锌薄膜材料生长做了研究。X-射线衍射方法对氧化锌薄膜的结晶质量做了比对测试。测试结果表明薄膜是沿着（002）方向生长。利用光荧光谱测试分析,对薄膜的发光特性做了研究,研究发现随着氧气分压增大,薄膜的紫外发光峰增强。通过原子力显微镜测试,对薄膜的表面形貌做了观察,发现结晶颗粒的平均粗糙度、均方根,以及平均直径随着氧气分压的增大呈现逐渐变小的趋势。

英文摘要：

ZnO thin films were grown on Si substrates by metal-organic chemical vapor deposition under different oxygen partial pressures,and the properties of the films were studied.It was found sharp diffraction peaks for ZnO（002）by X-ray diffraction,indicating the films were highly c-axis-oriented.The photoluminescence spectra of the ZnO films were studied.The surface morphology was studied by the atomic force microscopy.It was found that the ZnO films grew in a column-by-column process.The average grain size and the root-meansquare values for the film-surface morphology were decreasing with the increasing oxygen partial pressure.