中文摘要：

为了同时实现应用于步进扫描投影光刻机中的长行程直线电机的高推力密度、低推力波动和低铜损耗,提出了基于多种群遗传算法（multiple population genetic algorithm,MPGA）的环形绕组形式无铁心永磁直线同步电机（air-corepermanent magnet linear synchronous motor,ACPMLSM）多目标优化设计方法。在建立磁场分析模型的基础上,推导了关键参数的解析表达式。以永磁体、环形绕组的尺寸为变量,以推力体积比、电机常数和推力波动为优化目标,提出了基于权重系数的多目标优化函数,应用搜索能力强、收敛速度快的多种群遗传算法优化电机的结构尺寸。结果表明,在不同的权重系数下,MPGA得到的电机优化设计结果与设计目标具有良好的一致性。有限元仿真和实验结果证明了所提方法的有效性和可行性。

英文摘要：

In order to achieve high thrust density, low thrust ripple and low copper loss simultaneously of long stroke linear motors applied to step and scan projection lithography, a multiobjective optimization design method of the air-core permanent magnet linear synchronous motor with ring windings based on the multiple population genetic algorithm was presented. On the basis of the magnetic field analysis model, the analytical formulae of key parameters was deduced. By using sizes of permanent magnets and ring windings as variables and taking thrust per volume, motor constant and thrust ripple as optimization goals, we proposed a multiobjective optimization function with weight coefficients, and applied the multiple population genetic algorithm with strong searching ability and fast convergence speed to optimizing structure and sizes of the motor. The results confirm that motor optimization design results by the multiple population genetic algorithm and the design goal have a good consistency for different weight coefficients. 3D finite element analysis （3D-FEA） and experimental results prove the validity and feasibility of the proposed method.