中文摘要：

针对光刻机工件台中的永磁同步直线电机伺服系统需要高跟踪精度和高频响等问题，电机驱动控制系统的电流内环应具有快速响应能力。为了研究高动态性能的电流环控制策略，提出一种基于空间矢量脉宽调制技术，并通过引入修正因子来优化电流预测控制的算法，在保证对电流指令稳定跟踪的同时，提高了电流环的动态性能，有效地解决了传统的电流预测控制策略中稳态特性和动态特性之间的平衡问题，适合应用在要求电流环具有高动态特性的场合。构建了系统仿真模型和基于FPGA的实验平台，仿真和实验结果表明该优化算法的正确性和实用性。

英文摘要：

For permanent magnet linear synchronous motor servo system applied in the wafer stage of li- thography, high tracking precision and high frequency response is required, and the system often requires fast response current inner loop. To study the control strategy of the current loop with the high dynamic performance, based on space vector pulse width modulation technology, an improved predictive current control with introducing correction factor is proposed. This strategy not only makes the tracking current steady, but also improves the dynamic performance of the current loop. It is a good solution to the equi- librium problem between steady-state and dynamic characteristics in the traditional predictive current con- trol strategy, and is suitable for application in the occasion of high dynamic characteristics of a current loop. Simulation model and experiment platform based on field programmable gates array （FPGA） were constructed, and the simulation and experimental results show the proposed optimal algorithm is correct and effective.