中文摘要：

表面界面动力学粗化过程是凝聚态物理领域重要的研究内容,为研究基底不完整性对刻蚀模型动力学标度行为的影响,本文采用Kinetic Monte Carlo（KMC）方法,分析研究了在随机稀释基底上刻蚀模型（Etching model）生长表面的动力学标度行为.研究发现：尽管随机稀释基底的不完整性会对刻蚀表面的动力学行为产生显著的影响,导致刻蚀表面粗糙度指数和生长指数有明显的增加,但其仍基本满足原有的动力学标度规律.此外,本文还对刻蚀表面动力学标度指数的有限尺寸效应进行了分析讨论.

英文摘要：

Surface roughening has been extensively studied in many fields of science and technology.In order to investigate the influence of imperfection of the randomly diluted lattices on dynamic scaling behavior of the surfaces,the etching model growing on diluted squares is simulated by kinetic Monte Carlo（KMC） simulation.It is found that although the scaling behavior of the etching model can be affected by imperfections of the randomly diluted lattices,the roughness and the growth exponent are larger than those of the growth on perfect squares.The scaling behavior still satisfies the Family-Vicsek dynamic scaling.In addition,the finite system size effect of the randomly diluted lattice is also calculated and analyzed.