中文摘要：

不同精力离子横梁在硅和 AISI52100 钢的表面上扔的 CrN 涂层的破裂行为帮助了磁控管劈啪作响技术(IBAMS ) 用缩进和动态周期影响被学习。为硅底层上的涂层，裂缝在缩进角落形成然后在 Vickers 缩进下面向外宣传，这被发现。用离子准备的涂层帮助了 800 eV 表演的精力最高的破裂抵抗由于它的紧缩的结构。在 Rockwell 缩进下面，当处于帮助 800 的精力的离子的条件 eV，光线的、侧面的裂缝和 spalling 出现在缩进的附近时，没有离子帮助，仅仅更好的光线的裂缝在 AISI 52100 钢上在 CrN 涂层被发现。在动态周期影响下面的 CrN 涂层的破裂是类似的使疲劳。CrN 涂层的影响破裂抵抗随帮助精力的离子的增加增加。

英文摘要：

Fracture behavior of CrN coatings deposited on the surface of silicon and AISI52100 steel by different energy ion beam assisted magnetron sputtering technique （IBAMS） was studied using indentation and dynamic cycle impact. It is found that, for the coatings on silicon substrate, the cracks form in the indentation corners and then propagate outward under Vickers indentation. The coating prepared using ion assisted energy of 800 eV shows the highest fracture resistance due to its compact structure. Under Rockwell indentation, only finer radial cracks are found in the CrN coating on AISI 52100 steel without ion assisting while in the condition of ion assisting energy of 800 eV, radial, lateral cracks and spalling appear in the vicinity of indentation. The fracture of CrN coatings under dynamic cycle impact is similar to fatigue. The impact fracture resistance of CrN coatings increases with the increase of ion assisting energy.