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Evidence of interface conversion and electrical characteristics improvement of ultra-thin HfTiO film
  • ISSN号：0003-6951
  • 期刊名称：Applied Physics Letters
  • 时间：2011.10.10
  • 页码：-
  • 相关项目：钛氮共掺氧化铪栅介质薄膜的界面抑制和性能调控
作者： Ye, Cong|Wang, Yi|Zhang, Jun|Zhang, Jieqiong|Wang, Hao|Jiang, Yong|
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钛氮共掺氧化铪栅介质薄膜的界面抑制和性能调控
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