拉曼光谱技术作为常用的表征和测试分析手段,已被广泛的应用。本文设计搭建了基于激光显微共聚焦拉曼光谱仪的偏振拉曼光谱测试系统,将入射激光和拉曼散射的偏振引入拉曼光谱测试系统中。应用该实验平台,测试物理气相传输(PVT)法制备的4H-SiC样品,结果表明其拉曼光谱强度具有旋转偏振变化规律。本文所设计的系统将为偏振拉曼的研究提供实验基础,也为相关材料的分析提供技术保障。
Raman spectroscopy has been widely used for general characterization and measurement. Based on laser micro-confocal Raman spectroscopy, this paper design a Polarized Raman Scattering Spectra Measurement(PRSSM) system, introducing the polarization of exaction laser and Raman scattering to Raman Scattering Spectra Measurement(RSSM). Applied PRSSM to measure 4H-SiC grown by PVT, results indicate that the change of Raman spectroscopy intensity depends on the polarization of exaction laser and Raman scattering. The system would provide experiment measurement for polarized Raman study, and also provide technical support for related material analysis.