中文摘要：

实际移相干涉图像因受不同误差源的影响，不同相移算法的相位提取精度不同，导致实际干涉测量系统的检测精度也不同．文中以多步相移算法中的5、6、7、13步相移算法为例，仿真分析比较了不同相移算法因激光器波长不稳定和光强不稳定引入的面形检测误差．研究结果表明：激光器的波长不稳定和光强不稳定均在检测中引入了随机性误差；多次平均下，步数越多的算法因激光器波长不稳定和光强不稳定引入的误差越小但彼此差别不大，各算法对激光器不稳定引入的这两种误差的抑制效果均不明显．

英文摘要：

As the actual phase-shifting interference images are affected by several error sources, the phase extraction accuracy of different phase-shifting algorithms is different, resulting in different measurement accuray of the whole interferometry system. Take Steps 5,6,7 and 13 of multi-step phase- shifting algorithm as examples, the errors caused by laser wave instability and intensity instability are compared through numerical simulation. The results show that the errors caused by laser wave and intensity instability are random,that in the average measurement, the errors of the algorithm with more steps caused by wave instability are smaller, but with tiny differences between them, and that none of algorithms have obvious suppression effect on the laser instability errors.