中文摘要：

高反膜的抗激光损伤特性严重影响着激光系统中激光器有效输出功率的提高。因此提高高反膜的抗激光损伤特性就成为了关键。在真空箱式镀膜机中采用阻蒸发法制备Ag膜,电子束蒸发的方法制备介质保护膜,采用Lambda950测试其光学特性,在激光损伤测试仪上测试薄膜的损伤阈值。分析沉积温度对单层银膜光学特性和附着力的影响,不同层数的介质保护膜对Ag膜的光学特性和抗激光损伤能力的影响。研究结果表明：沉积温度分别为室温、120℃、150℃及200℃时制备单层银膜,在沉积温度200℃下,制备的银膜在1 000~1 400nm波段的平均反射率达到了99.17%,此时银膜的激光损伤阈值为1.74J/cm2,在银膜外侧加介质保护膜后其损伤阈值达到了6.874J/cm2,经激光预处理后,损伤阈值提高到10.83J/cm2,是单层金属膜损伤阈值的6倍。

英文摘要：

Anti laser damage properties of high anti-film seriously affect the effective output power of laser system.So it is the key to improve the anti laser damage properties of high anti film.The Ag film was prepared by the method of evaporation in vacuum chamber coating machine.Method of electron beam evaporation for preparation of dielectric protective film,and the optical properties of the film were measured by Lambda950.The laser damage threshold of the film was tested on the laser damage tester.The effects of deposition temperature on the optical properties and adhesion of single layer silver film were analyzed.The effects of different layers of dielectric film on the optical properties of Ag films were analyzed.The results show that the monolayer silver films were prepared at room temperature,120 ℃,150 ℃ and 200 ℃ respectively.At the deposition temperature of 200 ℃,the average reflectivity of Ag films prepared at 1 000~1 400 nm wavelength is 99.17%,At this time,the laser damage threshold of silver film is 1.74J/cm2.The damage threshold of the protective film on the outer side of the silver film is 6.87J/cm2.The damage threshold is increased to 10.834J/cm2,which is 6times of the damage threshold of single metal film by laser pretreatment.