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中文摘要：
为100％保证薄膜宽度指标，采用光学成像方法，用线阵CCD作光电接收传感器，以单片机作主控处理器，设计了可用于高精度测量薄膜宽度的装置，对薄膜宽度进行在线非接触高精度测量，经论证取得了较好的测量效果，生产现场精度优于±0．050mm，实验室精度优于±0．040mm.
英文摘要：
To completely ensure the requirement of thin film width in production field, a devise was designed and applied to the width measurement of film with high accuracy. The linear CCD was used as the photoelectric receiver sensor and SCM was used as the main control processor. On-line high - accuracy survey was carried out and good result was achieved. It is indicated that the precision is higher than ± 0. 050 mm in production field and which is better than ± 0. 040 mm in the lab environment.
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