中文摘要：

重点考察了化学水浴沉积法（CBD）制备CdS多晶薄膜时pH值对薄膜质量的影响规律。分别采用SEM、XRD、UV光谱仪和台阶仪研究了薄膜的表面形貌、晶体结构、透过率和厚度特征。研究表明，当PH值在8．43～10．09间变化时，薄膜为立方晶型，随着PH值的降低，晶粒出现择优生长，薄膜透过率逐渐升高，吸收边蓝移，禁带宽度增大。当pH值为8．43时得到的薄膜光学禁带宽度为2．44eV，接近其本征值。

英文摘要：

CdS films were prepared by chemical bath deposition （CBD） method at different pH values. The influences of the pH value, measured at reaction temperature, on the surface morphology, structure, thickness and optical properties of CdS films were studied by analysising the films with SEM, XRD, step profiler and UV speetrophotometer. The results showed that films with compact grains, no pinholes and cubic crystal structure were obtained in the whole range of the pH values studied. With the decrease of pH value from 10.09 to 8.43, the crystals tends to grow along the orientation of （111） face, the size of the clusters decreases from more than 200nm to 80nm while the size of the crystal grains increases from 15.5-27.0nm, the thickness of the films decreases from 340-80nm, the transmittance of the films increases, the absorption edge shifts to the blue side and the band gap value of film increases from 2.36-2.44eV.