中文摘要：

研究了通过烧结曲线优化来实现无排气孔结构的高性能低温共烧陶瓷（LTCC）无源高温压力传感器的制备。通过对比实验,成功摸索出了无排气孔结构的传感器烧结温度曲线。相比于传统LTCC压力传感器,该无排气孔结构的传感器由于无需玻璃浆料封口,避免了由于两种材料高温下热膨胀系数不匹配导致的传感器密封失效问题,确保了传感器在高温下工作的可靠性。测试结果表明：在2.0 bar,400℃以内,所制备的LTCC高温压力传感器具有极好的灵敏度和线性度,最大平均灵敏度为1.96 MHz/bar,最大非线性误差为4.52%,优于之前国内外研究水平。

英文摘要：

The scheme for fabricating high-performance low temperature Co-fired ceramic （LTCC） passive high- temperature pressure sensor which has its structure without vent hole through optimizing the sintering curve is studied herein. The optimized sintering curve is successfully achieved by comparative test. Because there is no need for sealing the proposed sensor without vent hole by glass slurry. Comparing with the conventional LTCC pressure sensor, reliability of the proposed sensor can be guaranteed owing to that the seal failure of the sensor caused by the mismatch of thermal expansivity of two kinds of materials can be avoided. Measurement results demonstrate that the fabricated sensor has considerable sensitivity and linearity within the temperature of 400℃ and the pressure of 2.0 bar. The sensor has the maximum average sensitivity of 1.96MHz/bar and the maximum linearity error of 4.52 % , which are better than the research level in borne and abroad.