无线被动压力传感器等价物到引入电容(LC ) 回声电路并且基于氧化铝陶器被使用高温度 sintering 制作陶器、火以后的 metallization 过程。圆柱的铜螺线读者天线和屏蔽层被设计在高温度环境为传感器认识到无线测量。传感器的高温度表演被学习读者天线的阶段频率和振幅频率特征分析并且讨论。传感器的平均频率变化是 0.68 kHz/i 吗??
A wireless passive pressure sensor equivalent to inductive-capacitive (LC) resonance circuit and based on alumina ceramic is fabricated by using high temperature sintering ceramic and post-fire metallization processes. Cylindrical copper spiral reader antenna and insulation layer are designed to realize the wireless measurement for the sensor in high temperature environment. The high temperature performance of the sensor is analyzed and discussed by studying the phase-frequency and amplitude-frequency characteristics of reader antenna. The average frequency change of sensor is 0.68 kHz/℃ when the temperature changes from 27℃ to 700℃ and the relative change of twice measurements is 2.12%, with high characteristic of repeatability. The study of temperature-drift characteristic of pressure sensor in high temperature environment lays a good basis for the temperature compensation methods and insures the pressure signal readout accurately.