中文摘要：

采用周期半导体激光为加热源，连续半导体激光为探测光，光学显微镜物镜聚光，应用稳态的光热反射探测技术得到相应于表面温度响应的周期反射信号，建立一套5-10微米分辨率的实验室用测试系统。利用光刻的形式，制作了掩埋在金属表面下si基体中的SiO2的图形，分别使用不同频率对其进行一维扫描，在合适的频率下得到被埋藏物的信息，实现微米量级简单结构复合试样的热结构测量。

英文摘要：

By using period semiconductor laser as source of heat, continuum semiconductor laser as detect laser and applying steady photo thermoreflectance technique to get period reflect signal respond surface temperature, a set of 5-10 micron resolution testing system used in laboratory is set up in this paper. A pattern of SiO2 burying under metal surface is photoetched in the base of Si. The information of the embed substance can be gotten under appropriate frequency through one-dimension scanning the sample under deferent frequency. It can measure the simple structure complex sample in micro scale.