中文摘要：

建立了适用于高频测量的3ω测试系统．对于薄膜／衬底复合结构，在低频范围内采用斜率-求差-3ω法，同时确定了单层薄膜和衬底的导热系数．采用低频和高频测量相结合的方法测量了Nd：YAG晶体和（111）面上微／纳米ZrO2／SiO2多层增透薄膜中各层的导热系数．进行了不确定度分析．建立的测量原理和测试系统可用于基体表面多层薄膜以及微纳米器件热物性的表征．

英文摘要：

The 3ω measurement system was setup for high frequency. The slope-differential-3ωmethod was applied to simultaneously determine the thermal conductivities of s single layer/substrate composite structure. The thermal conductivities for Nd： YAG crystal and ZrO2/SiO2 multi-layered antireflective films on its （111） surface were obtained with the combined measurements over low and high frequency range. The uncertainty analysis was presented. The comparison between the measured results and reference data justified the method. The 3ω setup and the principle can be employed to characterize the thermal properties of the multi-layered structure and micro/nano-system.