中文摘要：

提出了一种双质量块调谐输出式硅MEMS陀螺仪。采用两块反相、同频、等幅振动质量块作为敏感单元,通过测量谐振器谐振频率变化来计算转速的大小。推导了哥氏力与输入转速的传递函数,用瑞利-里茨法求得在轴向力作用下梁的固有频率方程,利用马蒂厄方程分析了双端音叉谐振器的运动数学表达式及陀螺仪标度因数方程。ANSYS分析表明:谐振器固有谐振频率为4.0431×106Hz;在谐振器端部施加1×106Pa预载荷后,谐振频率偏移量为20.7 kHz。仿真结果验证了理论推导的正确性。该陀螺仪减少了振动噪声及能量损耗,消除了外界共模加速度引起的误差。

英文摘要：

In order to improve the precision of gyroscope,a silicon Micro-electro-mechanical System(MEMS) gyroscope with Dual-mass Resonant Output(DMRO) was proposed. The resonant output gyroscope consisting of two proof masses with anti-phase and uniform frequency utilized resonant sensing to detect Coriolis force. The transfer function of Coriolis force versus the angular rotational rate were analyzed by a dynamic method and the resonant frequency of the beam subjected to an axial time-varying Coriolis force was des...