中文摘要：

在金属有机盐沉积（MOD）法制备YBCO薄膜的工艺中，采用无F的α甲基丙烯酸铜取代原来的三氟乙酸铜，可以降低前驱溶液中大约50％的氟含量．研究表明，该方法大大缩短了YBCO前驱薄膜受热分解的时间，仅为原来的1／7．通过XRD、SEM分析发现，该方法可以制备成分单一、具有良好立方织构的YBCO薄膜，且薄膜表面平整致密，没有裂纹，临界温度（Tc）达到了90K左右，77K、自场下的临街电流密度（Jc）达到了2．84MA／cm^2．通过在制备的YBCO薄膜中引入6mol％的Zr元素掺杂，有效地提高了YBCO薄膜在外加磁场下的超导性能．

英文摘要：

Through replacing copper Tri-fluoroacetate by copper α-methacrylic in Metal Organic Deposition（MOD） process,the total amount of fluorine in YBCO precursor solution was reduced by about 50%.As a result,the calcination period for YBCO precurse film was dramatically reduced.The calcination time was reduced to 2h,only one seventh of that in all-Fluorine MOD process.X-ray diffraction and scanning electronic microscope（SEM） measurements show that YBCO films have strong YBCO（00l） peaks and crack-free surface.The critical temperture（Tc） and critical current density（Jc at self-field,77K） are 90K and 2.84MA/cm2,respectively.Furthermore,the property of YBCO film prepared by the fluorine-reduced MOD method is enhanced greatly by incorporating 6mol% Zr element into the film.