本文采用金属有机盐沉积(MOD)方法,在钇稳定氧化锆(YSZ)单晶上依次制备了CeO2过渡层和YBCO超导层,测得其Tc,onset值为90.5 K,Jc值为1.3 MA/cm2。在沉积YBa2Cu3O7-x(YBCO)过程中发现薄膜中生成了BaCeO3相,继而对该相的生成条件及其对YBCO性能的影响进行了研究。结果表明BaCeO3是在YBCO相生成之后,CeO2与YBCO反应生成的,且以MOD方法制备的YBCO薄膜时难以避免BaCeO3相的产生。
In this paper,CeO2 buffer layer and YBCO superconducting layer were deposited on the yttrium stabilized zirconia(YSZ) single crystal by metal organic deposition(MOD) method.The values of Tc and Jc of the YBCO film were 90.5 K and 1.3 MA/cm2,respectively,it's indicated that high performance YBCO film was obtained.But BaCeO3 phase was found in YBCO/CeO2/YSZ film.Then,the formation condition of BaCeO3 and its influence on the superconducting performance of YBCO were investigated.The results revealed that BaCeO3 is formed after the synthesis of YBCO phase,and BaCeO3 is the product of the reaction between CeO2 and YBCO,and BaCeO3 phase is inevitable during the process of YBCO films by MOD method.