介绍了差动位移传感器的工作原理,在此基础上,提出了一种集成式径向磁轴承专用传感器的结构,给出了基于AD598芯片为核心的位移信号处理电路设计方法,并试验了单自由度的静态性能以及同结构双自由度间信号耦合的静态性能分析。结果表明:文中介绍的集成式径向差动位移传感器的性能可以满足磁悬浮系统工作的要求。
This paper introduced the basic principle of differential displacement sensor, based on this, it proposed a kind of sensor structure of integrative radial magnetic bearing, gave the design method of displacement signal processing circuit based on AD598 ,and tested static performance of single direction and signal coupling static performance in double direction. The result shows that the integrative radial differential displacement sensor can satisfy the work request of magnetic suspend system.