中文摘要：

电磁场的分布情况是影响电涡流传感器灵敏度和线性度的主要原因。从电涡流传感器的基本原理出发，采用有限元方法，利用ANSYS语言，通过建模、定义材料特性、划分网格、设置边界条件、加载及求解等，对电涡流传感器的电磁场进行仿真研究，并由理论公式验证模型的正确性。通过计算3种尺寸参数不同的线圈，研究分析了线圈的形状结构对传感器灵敏度和线性度的影响，对于电涡流传感器线圈的设计具有指导意义。

英文摘要：

The sensitivity and linearity of eddy-current sensor are affected mainly by the distribution of the electromagnetic field. A simulation model of eddy-current sensor is created by means of finite element method （ FEM ）, utilizing the ANSYS language. At first, a physical model is set up, material characteristics is defined and the areas are meshed,then the border conditions are established, finally loading and solving are made. A existing theoretic formulary is used to validate correctness of the model at the same time. Computing three kinds of coils with different parameters ,a study and analysis on how the coil structure affects the sensitivity and linearity of eddy- current sensor is made from the results. Experiment shows that the theoretical model of eddy-current sensor can be valuable for design of coil of eddy-current sensor .