主要从实验角度研究了在波长780 nm飞秒激光作用下石英的烧蚀,给出了石英烧蚀孔径与能量的关系,计算出石英的烧蚀阈值为1.06 J/cm^2。并研究了光阑对孔径的影响,能量、扫描速度、扫描次数与微槽宽度和微槽深度的关系。
The ablation of fused silica were mainly explored from experiments with the femtosecond,and the wavelength of femtosecond laser is 780 nm.The relationships between energy and diameter and depth were given,and the ablation threshold of fused silica was figured out at 2.28 J/cm^2.The diaphragm,s influence on diameter is also studied.Furthermore,the relationships between energy,as well as scan speed and scan times,and the depth and width of microgroove were discussed.