中文摘要：

采用化学溶液沉积技术,在单晶硅衬底上制备了钼酸锶多晶薄膜;利用XRD和SEM分析了薄膜的晶相和形貌;系统研究了化学溶液沉积制备钼酸锶多晶薄膜中的工艺参数,包括化学溶液的组成（醇、酸的含量）、溶液浓度、热处理工艺以及采用不同的锶盐等,对钼酸锶薄膜生长的影响。研究结果表明,采用化学溶液沉积技术制备的钼酸锶多晶薄膜均具有单一的四方相结构;除溶液中的醇含量之外,所讨论的工艺参数对薄膜的相结构、形貌、显露晶面等均会带来一定的影响;优化工艺参数、控制工艺规范对于获得结构致密、晶粒发育良好的钼酸锶薄膜是非常重要的。

英文摘要：

Under different processing conditions,crystallized SrMoO4films with single scheelite-structure have been prepared on Si substrates via chemical solution deposition.The films were characterized by X-ray diffraction（XRD）and scan electric micrograph（SEM）techniques.The effects of the processing parameters（including the contents of alcohol and acetic acid,solution concentration,and so on）on the structure and morphologies of the films have been systematically discussed.The research results indicated that all the prepared SrMoO4 films possess tetragonal phase with scheelite-structure and the growing characteristic of the films relied on the processing conditions except for the content of the alcohol.And also optimizing the processing conditions is very important for obtaining the dense and well-growth SrMoO4 thin films.