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Stop grating for perfect replication of micro Fresnel lens by thermal imprinting
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：0
  • 页码：-
  • 相关项目：纳米压印微光学器件中形貌误差产生机理及控制方法研究
作者： Gao, Yulong|Lin, Jie|Jin, Peng|Tan, Jiubin|Davies, Graham|Prewett, Philip D.|
同期刊论文项目
纳米压印微光学器件中形貌误差产生机理及控制方法研究
期刊论文 9 会议论文 1
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