纳米结构的氧化锌(ZnO)可以吸附大量的气体,并且在吸附了气体之后形成特定的表面态,从而对其导电性产生显著的影响。用水热法在ITO电极之间制备了ZnO纳米棒阵列,通过扫描电镜(SEM)、X射线衍射(XRD)和高分辨透射电镜(HRTEM)等表征后发现,制得的ZnO纳米棒具有较好的结晶性。在200℃下,当1.25mg/L的CO气体通过ZnO纳米棒时,ITO电极两端的电流发生了较明显的改变,显示该装置对CO气体具有较明显的响应(灵敏度为18)。可以预见通过改变电极之间生长的ZnO纳米结构形貌,提高纳米结构的表面利用率,以及适当提高测试温度,可以进一步提高传感器的灵敏度。制作的气体传感器具有简单、廉价、环保的特点,对于气体传感器的设计提供了新的思路。
Zinc oxide (ZnO) in nanostructure has the feature to adsorb great amount of gas in order to form a certain kind of surface state. The electronic conductivity of ZnO nanorod experiences a considerable change during the process of adsorption. In this work, gas sensor was fabricated from ZnO nanorod arrays prepared via a facile hydrothermal decomposition on Indium Tin Oxide (ITO) glass. The ZnO nanorods show very good crystalline characterized by Scanning Electronic Microscopy ( SEM), X-Ray Diffraction and High Resolution Transmission Electronic Microscopy (HRTEM). It was found that the sensor show sensitive response to the in- troduction of CO of 1.25 mg/L at 200 ℃ with a sensitivity factor (S) of 18. It would be desirable that even better sensitivity be achieved by means of enhancement of the ZnO crystalline structure and improvement of thesurface reaction efficiency. More importantly, this is a simple cheap approach to manufacture gas sensors with nice environment-friendly. It would probably turn out to be an economic way to produce gas sensors in a large scale with low cost to meet the industrial requirements.