中文摘要：

对单晶硅电火花铣削过程中电极表面出现的覆盖层进行了分析，分析结果表明，该覆盖层的主要成分是SiO2。实验证明，SiO2是加工过程中电化学反应的产物。研究了电参数对SiO2覆盖层厚度的影响规律。研究结果表明，可以通过控制SiO2覆盖层的厚度来保护电极和补偿电板损耗，实现低损耗甚至无损耗的单晶硅电火花铣削加工。

英文摘要：

Electrode covering effect on monocrystalline silicon in electrical discharge milling was analyzed and the covering material was SiO2. The SiO2 cover was proved to be generated from some electrochemical reactions during the process. The effects of electrical parameters on the covering thickness were researched, and electrical discharge milling of low or even no electrode wear can be realized by controlling the covering thickness to compensate for electrode wear.