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Microfabrication of a multilayer nano-ESI focusing electrode based on SU-8 material
  • ISSN号：0167-9317
  • 期刊名称：Microelectronic Engineering
  • 时间：2013
  • 页码：150-155
  • 相关项目：大气压环境下高输运效率MEMS纳升电喷雾电离源的研究
作者： Helin Zou|Jin Li|Petr Jurcicek|Guoqi Wang|
同期刊论文项目
大气压环境下高输运效率MEMS纳升电喷雾电离源的研究
期刊论文 8
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