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Fabrication of 2D polymer nanochannels by sidewall lithography and hot embossing
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：2013.7.7
  • 页码：1-8
  • 相关项目：大气压环境下高输运效率MEMS纳升电喷雾电离源的研究
作者： Cheng, E.|Zou, Helin|Yin, Zhifu|Jurcicek, Petr|Zhang, Xi|
同期刊论文项目
大气压环境下高输运效率MEMS纳升电喷雾电离源的研究
期刊论文 8
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