作者机构:[1]Institute of Manufacturing Engineering, Department of Precision Instruments and Mechanoiogy, Tsinghua University, Beijing 100084, China
相关基金:Supported by the National Natural Science Foundation of China(Nos 50775117 and 50775125); the National High-Tech Researchand Development (863) Program of China (No 2007AA041901); the National Key Technology Research and Development Program(No 2006BAF01B09); the Technology Innovation Fund ofAVIC (No 2009E13224)
Acknowledgements The authors would like to thank Associate Prof. Liu Xinjun from the Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, for his support in this research and the careful revision of this paper.