中文摘要：

采用微磨床及微磨具的微细磨削技术,可以实现多种材料复杂形状三维微小零件的加工,且设备体积小、能耗少、成本低,已受到国内外研究人员的广泛关注。但是目前微细磨削技术的研究还处于起步阶段,在微细磨削机理、微磨床及微磨具等方面存在大量问题需要解决。因此非常有必要深入分析微细磨削技术的研究现状、存在的问题及发展趋势。明确了微细磨削技术的内容范畴;全面总结了微细磨削机理及工艺、微磨床及其关键部件、微磨棒等方面的研究现状;在此基础上,深入探讨了微细磨削技术在磨削机理及工艺、微磨床和微磨棒等方面存在的基础性问题,并进一步指出微细磨削技术还应关注其向多种材料应用、复合化加工、高效高精及智能化柔性化的发展方向,以期促进微细磨削技术在我国的推广应用,提升我国超精密微小零件的加工制造水平。

英文摘要：

The micro-grinding technology with micro-grinding machines and micro-grinding tools not only is able to manufacture geometrically complex 3D miniature components in a wide range of engineering materials, but also has small equipment volume, low energy consumption and low cost. Therefore, it attracts more and more attention of researchers worldwide. However, the research on micro-grinding technology is in its infancy, and there are many problems to resolve in micro-grinding mechanism, micro-grinding machine and micro-grinding tool. Therefore, it is very necessary to analyze the research state, existing problems and development tendency of micro-grinding technology deeply. The scope of micro-grinding technology is identified. The research states of micro-grinding mechanism and process, micro-grinding machine and its key components, and micro-grinding tool are fully summarized. On this basis, the basic problems faced by micro-grinding technology including grinding mechanism, micro-grinding machine and its key components, and micro-grinding tool are deeply discussed. Moreover, the development tendency of micro-grinding technology needing to be noted was further pointed out, which includes the ability of machining more engineering materials, compound process, high efficiency and high precision, intelligence and flexibility. It is expected to promote the application of micro-grinding technology and improve manufacturing level of ultra-precision miniature components in China.