中文摘要：

微细切削技术是精密超精密制造技术的研究热点之一,对不同材料的复杂三维微小零件加工具有独特优势.微细切削机床作为微细切削技术的重要组成部分,已呈现出微小化的发展趋势,是当今微加工装备研究与开发的重点.系统总结微细切削用微机床中床身、微主轴单元、进给工作台、微切削刀具、数控系统、监测系统等的研究现状;分析微机床中亟待解决的主机结构微小化、微主轴的高速高精度回转、工作台的高精度快响应进给、微切削刀具结构与性能、数控系统的开放性与高精度插补、加工过程的可视化监测以及整机性能研究等关键技术问题,提出解决上述问题的可能性对策;预测微细切削用微机床的发展趋势.

英文摘要：

Micro-cutting technology which has a unique advantage in 3D complex parts processing is a hot spot to precision and ultra-precision manufacturing technology research.Micro-cutting machine tool as an important part in micro-cutting technology has presented a miniaturized trend and became an emphasis in current research of micro manufacturing equipment.The research status of micro machine tool for micro-cutting are systematically summarized from the aspects of machine tool bed,micro spindle unit,feed table,micro cutting tools,NC system and monitoring system.Some key technology problems are analyzed such as miniaturized machine tool bed,high speed and high rotation accuracy of micro spindle,high precision and fast response of micro table,structure and performance of micro cutting tool,openness and high precision interpolation of NC system,visual monitoring of machining process,performance of machine tool and so on.Meanwhile,feasible countermeasures toward mentioned problems are presented.The development trend of micro machine tool for micro-cutting is forecasted.