中文摘要：

通过减小电极孔径到微米量级来实现高气压甚至大气压放电的现象已成为研究热点。笔者利用不锈钢空心针作为放电阴极，不锈钢网作阳极，进行了大气压微等离子体放电实验研究。实验测量了大气压微放电的伏安特性曲线。实验发现，大气压直流微放电存在不同的放电模式：空心阴极放电和反常辉光放电，随着电流的增加，放电越来越强烈。实验研究了放电电压随压强和气体流量的变化关系。结果显示，随着体系压强的增加，电离过程增多，放电电压逐渐降低。随着流量的增加，气体流动状态由层流状态逐渐过渡到紊流状态，引起放电电压先降低后增加。

英文摘要：

An atmospheric pressure argon direct current microplasma discharge apparatus was built using a stainless steel capillary as the cathode, a stainless steel mesh as the anode. The voltage-current characteristics were incasured, and different modes of discharge, hollow cathode discharge and abnormal glow discharge, were observed. It is shown that the voltage-current characteristic is similar to the known characteristic of low pressure glow discharge. The dependences of discharge voltage on gas pressure and argon flow rate were investigated. The experimental results show that the discharge voltage decreases when the gas pressure increases, and the dependence of discharge voltage on gas flow rate exhibits different characteristics i.e. discharge voltage decreases first with gas flow rate, and then increases.