中文摘要：

提出了一种新颖的微机械谐振式微流量传感器。该传感器采用电磁激励方式。传感器主要由1个3μm厚H型谐振器、1个40μm厚的悬臂梁平板（2000tzmX5000txm）以及连接平板和框架的2根40μm厚的支撑梁组成。谐振器采用低应力富硅氮化硅SiN制作，可以方便地使用湿法腐蚀释放谐振器，从而简化工艺流程，提高成品率。文中分析了理论模型、有限元仿真（FEA）、工艺制造和测试结果。测试结果显示，传感器在1SLM（标准L／min）流量下，频率漂移为500Hz，分辨率达到5／1000。但在输出（谐振器频率漂移）和输入（气体流量）间存在二次曲线关系。

英文摘要：

A novel resonant micro flow sensor was proposed. The electromagnetic excitation was adopted. The basic construction consists of a 3-μm-thick H-type resonator （30 × 1 000） μm^2 and a 40-μm-thick square cantilever paddle （2 000 × 5 000） μm^2 which connect frame with two 40-μm-thick supporting beams. The resonator was made of LPCVD silicon rich silicon nitride SiN, it can be fabricated only by KOH wet etching due to the chemical durability of SiN, which can simplify the production process. The theoretical analysis,FEA-ansys simulation, fabrication process, and the testing experiments were discussed. The experiment results show that the frequency shift of the sensor is 500 Hz/（ SLM）, resolution is up to 0.5%. The relationship between output （frequency shift） and input （flow of air） is a quadratic curve.