中文摘要：

以基于CNT的微纳电子器件为基础,综述了近年来改善CNT与金属电极间电接触性能的研究进展,阐述了各种改善CNT与金属电极间电接触性能方法的原理和优缺点。通过超声波焊接处理、金属颗粒黏结、碳纤维辅助组装、包覆CNT等处理工艺,可以获得阈值电压低、发射电流密度高和稳定性好的CNT场发射器;采用原子层沉积法、溶液处理法、超声波焊接法、高温退火法等可以很好地改善CNT与金属电极间的电接触性能,进而提高CNT晶体管的迁移率、跨导率和通断电流比;化学机械抛光、电子束诱导沉积等处理工艺可以增加CNT和金属电极的接触面积,降低两者间的接触电阻,从而实现高承载电流的CNT互连线。

英文摘要：

On the basis of carbon nanotube-based micro-and nano-electronic devices,this paper reviews the progress on improving the electrical contact performance of CNTs with metal electrodes in recent years. The methods available for improving the electrical contact performance of CNTs with metal electrodes and their principles along with their advantages and disadvantages are described. By using ultrasonic bonding,metal nanoparticle adhesion,carbon fiber assisted assembly and coating of CNTs,the CNT field emitters with low threshold voltage,high emission current density and good stability are obtained. By employing the atomic layer deposition method,the solution processing method,the ultrasonic bonding method,and high temperature annealing method,the electrical contact performance of CNTs with metal electrodes can be greatly improved,and hence the electron mobility,transconductance and on/off switching ratio of CNT field effect transistors are all increased. While the treatment processes of chemically mechanical polishing and electron beam induced deposition can increase the contact area between CNTs and metal electrodes,and reduce the contact resistance of between them,therefore CNT interconnects with high current-carrying capacity are achieved.