中文摘要：

采用边界元法对等截面梁进行静态弯曲变形分析,利用机械系统无坐标变换刚性结合法将多个等截面梁合成变截面梁,解析出直圆型柔性铰链刚度方程;基于直圆型柔性铰链的导向及传动原理,设计出一种可将直线位移转换为回转位移对称驱动导向及转换的微动回转机构,并对机构进行自由度分析;利用有限元法对该机构进行静力学分析,结果显示机构最大模拟应力远小于材料许用应力;采用有限元法对该机构进行动力学自由模态分析,并完成机构的模态分析试验,二者最大误差为6.52%,结果证明机构具有较高的前6阶固有频率且在精密宏微驱动回转系统运动过程中不会引起共振。机构性能分析及试验结果显示微动回转机构单自由度驱动、可靠性强、模态性能好。

英文摘要：

The deformation of static bending was analyzed for uniform beam by the boundary element method. Non-uniform beam was combined with multiple uniform beams by method of system rigid combination without coordinate transformation. Stiffness equation of flexure hinges with straight circular was proposed. A micro rotary mechanism with symmetric drive as well as guiding and transformation was designed based on drive and guiding principles of flexure hinges with straight circular, which is able to make linear motion displacement into rotary displacement, the analysis of degree of freedom about it was given. The analysis of statics with micro rotary mechanism was finished by the finite element method, and the analysis results show that the largest simulation stress of the mechanism is much less than the material allowable stress. The dynamics- free- modal with micro rotary mechanism was analyzed by the finite element, and experiment of the modal analysis was finished, the error between the experimental results and the finite element is less than 6. 25%, the analysis results prove that the mechanism has a high the First six order natural frequency and it will not cause resonance in the movement process of the precision rotary system with macro/ micro dual-drive. The analysis of performance and experiment shows that micro rotary mechanism has the feature of single-degree- freedom-drive and high reliability, as well as good performance of modal.