中文摘要：

针对树脂结合剂金刚石线锯磨粒把持强度低、耐磨性和耐热性差等问题,通过正交试验,配制了不同组分配比的涂覆层,制作了树脂结合剂金刚石线锯,并进行了单晶硅切割试验,试验研究了涂覆层各组分对树脂锯丝性能的影响。试验结果表明,当涂覆层中环氧树脂与酚醛树脂的质量比为2.5∶1、增韧剂CTBN质量分数为13%、偶联剂KH-550质量分数为1%、纳米SiO2的质量分数为3%、金刚石磨粒含量为500mg/mL时,制作的树脂结合剂金刚石线锯在材料去除率、磨损率、涂覆层结合力、切割表面质量等方面综合性能最优。

英文摘要：

In order to overcome the deficiencies of resin bonded diamond wire saw,such as low abrasive holding strength,poor wear resistance and heat resistance,new experiment is carried out by using different coating layer components through orthogonal experiments.It is also studied that the effect of components on performance of the wire saw by cutting mono-crystalline silicon.Results show that the optimal parameters in the components are mass ratio of epoxy resin and phenolic resin 2.5∶1,toughening agent CTBN 13wt%,coupling agent KH-550 1wt%,nano-SiO_2 particle 3wt%,and the content of diamond abrasive 500mg/mL.In this condition,the resin bonded diamond wire saw made in this condition has better comprehensive performance in terms of material removal rate,wear rate,coating layer bonding force and cutting quality of workpiece.